Flow Sensor Modules, Flow Meters, Liquid and Gas

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IDT mass flow sensor modules measure gas or liquid flow across a sensing surface using the thermo-transfer (calorimetric) principle. The flow sensor utilizes a series of MEMS thermocouples which provides excellent signal-to-noise ratio. The solid thermal isolation of the active MEMS sensing element along with the silicon-carbide film coating offers excellent abrasive wear resistance and long-term reliability. IDT offers an un-calibrated millivolt output version (FS1012) to the fully calibrated and linearized FS2012 for either gas or liquid with typical accuracy down to 2% of reading. These mass flow sensors are ideal for use in the industrial process, healthcare, medical & automotive markets.

  • Highly accurate and responsive gas & liquid mass flow sensor solutions suitable for FDA-compatible applications
  • Compact silicon carbide coating of the element enables use with liquids as well as gasses.  Also makes the element inert to the passing media.
  • Solid-State Thermopile Sensing with no cavity which makes cleaning easy & eliminates the possibility of clogging
  • Low Voltage, 3 to 5VDC
Part Number Description Datasheet Order
FS1012 Uncalibrated Output - Gas or Liquid pdf_icon_for_table.png Buy Now arrow_icon_for_table.png
FS2012 Calibrated Output - Gas or Liquid pdf_icon_for_table.png Buy Now arrow_icon_for_table.png

The sensors have no moving parts & feature a layer of silicon-carbide coating. This eliminates clogged sensor elements & fluid pressure sensitivity, provides excellent shock resistance, & prevents chemicals from damaging the sensor element – problems inherent to other, common sensor architectures. The attention to these issues make IDT's solution especially desirable for use in medical, industrial, and FDA-compatible food-grade consumer applications where reliability, robustness, and cross-contamination are critical factors.

The IDT flow sensor modules provide world class performance and reliability in a flexible module configuration suitable for a wide range of gas and liquid flow applications. These devices are perfectly suited for dosing, IV drip monitoring, and oxygen/anesthetic metering. Commercial applications for these devices include monitoring the flow of water or beverages in beverage machines and air or gas flow in process equipment.

IDT's line of high performance flow sensor (flow meter) modules measure gas or liquid flow. The innovative solid-state sensor element design eliminates cavities and diaphragms typically found in competitive offerings, and features a protective silicon-carbide coating, making for a very robust and reliable flow sensor element compatible with food-grade applications.

IDT offers uncalibrated stand-alone flow sensor modules with an analog output, as well as fully-calibrated versions featuring on-board analog to digital conversion and temperature compensation circuitry for plug-and-play usage in complex digital systems. The calibrated flow sensor modules offer gas or liquid measurement accuracy down to ±2% of reading.

Advanced Flow Sensor Technology

IDT's mass flow sensor measure gas flow or liquid flow across a sensing surface using the thermo-transfer (calorimetric) principle. The flow sensor utilizes a series of MEMS thermo-couples (thermopiles), which provide excellent signal-to-noise ratio. The solid thermal isolation of the active MEMS sensing element along with the silicon-carbide film coating offers excellent abrasive wear resistance and long-term reliability.

With no moving parts and no fragile diaphragm over a cavity, the design eliminates clogged sensor elements and fluid pressure sensitivity, and provides excellent shock resistance. In addition, the silicon-carbide coating prevents chemicals from damaging the sensor element.

About Liquid and Gas Mass Flow Sensors            

Flow sensors, also known as flow meters, are used to measure the flow rate, and ultimately the total volume, of gases or liquids passing through module's pre-determined cross sectional area. These measurements are critical in a broad range of applications, including beverage dispensers, IV drip monitors, oxygen monitors, mass air flow sensors, and gas flow monitors in process equipment.

IDT’s MEMS-based gas flow meter and liquid flow meter modules comprise a resistive heater, and two clusters of thermo-couples (thermopiles), each positioned symmetrically up and down-stream of the heater. The thermopile’s output changes according to the rate of flow; proportional to the amount of heat sensed from the heater. The analog output of the thermopile is typically converted into a calibrated digital output signal that can be used by the system processor.