Gas or Liquid Flow Sensor Module

The FS1012 comprise a MEMS flow sensor mounted on a circuit board with a flow housing. It features a 6-pin standard header connected directly to the MEMS flow sensor.

The FS1012 is capable of measuring a non-corrosive gas or liquid medium. The sensor utilizes thermopile sensing, which provides an excellent signal-to-noise ratio and is ideal for applications requiring low power. It is highly sensitive at low flow rates with a very fast response time.

The set of upstream and downstream thermopiles can be used independently in a single-ended circuit or connected together in a differential configuration.


  • Measures gas or liquid mediums
  • Robust solid isolation technology
  • No cavity in MEMS sensor to cause clogging
  • Resistant to vibration and pressure shock
  • Low power application
  • Fast response time
  • Millivolt output
  • Heater supply voltage: 3V to 5V DC
  • Operating temperature range: 0°C to +85°C

Product Options

Orderable Part ID Part Status Description Pkg. Code Temp. Range Buy Sample
FS1012-1001-LQ Active Liquid, 0 to 0.5 SLPM MOD0 0 to 85°C Availability
FS1012-1002-LQ Active Liquid, 0 to 1.0 SLPM MOD0 0 to 85°C Availability
FS1012-1020-NG Active Gas, 0 to 2 SLPM MOD0 0 to 85°C Availability
FS1012-1100-NG Active Gas, 0 to 10 SLPM MOD0 0 to 85°C Availability

Technical Documentation

Title Other Languages Type Format File Size Date
Datasheets & Errata
FS1012 Datasheet Datasheet PDF 292 KB Jul 20, 2017
Application Notes & White Papers
Whitepaper - MEMS Mass Flow Sensor White Paper PDF 347 KB Nov 15, 2017
Sensing Technologies and Sensor Solutions Overview 简体中文 Overview PDF 2.11 MB Jun 21, 2018
FS10xx/FS2012 High-Performance MEMS Flow Sensor Module Family Product Brief PDF 281 KB Feb 9, 2018