Gas or Liquid Flow Sensor Module

The FS1012 comprise a MEMS flow sensor mounted on a circuit board with a flow housing. It features a 6-pin standard header connected directly to the MEMS flow sensor.

The FS1012 is capable of measuring a non-corrosive gas or liquid medium. The sensor utilizes thermopile sensing, which provides an excellent signal-to-noise ratio and is ideal for applications requiring low power. It is highly sensitive at low flow rates with a very fast response time.

The set of upstream and downstream thermopiles can be used independently in a single-ended circuit or connected together in a differential configuration.

Features

  • Measures gas or liquid mediums
  • Robust solid isolation technology
  • No cavity in MEMS sensor to cause clogging
  • Resistant to vibration and pressure shock
  • Low power application
  • Fast response time
  • Millivolt output
  • Heater supply voltage: 3V to 5V DC
  • Operating temperature range: 0°C to +85°C

Product Options

Orderable Part ID Part Status Description Pkg. Code Temp. Range Buy Sample
FS1012-1001-LQ Active Liquid, 0 to 0.5 SLPM MOD0 0 to 85°C
Availability
FS1012-1002-LQ Active Liquid, 0 to 1.0 SLPM MOD0 0 to 85°C
Availability
FS1012-1020-NG Active Gas, 0 to 2 SLPM MOD0 0 to 85°C
Availability
FS1012-1100-NG Active Gas, 0 to 10 SLPM MOD0 0 to 85°C
Availability

Technical Documentation

Title Other Languages Type Format File Size Date
Datasheets & Errata
FS1012 Datasheet Datasheet PDF 292 KB Jul 20, 2017
Application Notes & White Papers
Whitepaper - MEMS Mass Flow Sensor White Paper PDF 347 KB Nov 15, 2017
Other
Sensing Technologies and Sensor Solutions Overview 简体中文 Overview PDF 1.66 MB Nov 7, 2018
FS10xx/FS2012 High-Performance MEMS Flow Sensor Module Family Product Brief PDF 236 KB Aug 22, 2018

Evaluation Boards

Part Number Title Sort ascending
SDAWIR Wireless Flow Rate, Humidity, and Temperature Sensing Evaluation Kit
SDAF0x Mass Flow Sensor Evaluation Kit