Gas or Liquid Flow Sensor Module with Calibration

The FS2012 is a high performance and fully calibrated mass flow rate module for non-corrosive gas or liquid flow. It features an accuracy error down to 2% of reading (typical).

The FS2012  comprises a MEMS flow sensor mounted on a circuit board with a flow housing and sensor signal conditioning components. It features a 6-pin standard header for both a fully calibrated analog and digital output (I2C).

The low power, high accuracy, and robustness make the FS2012 an excellent fit for applications such as process controls and monitoring, HVAC, air control systems, respiratory devices and liquid dispensing systems.

Features

  • Fully-calibrated output
  • Measures gas or liquid mediums
  • Robust solid isolation technology
  • No cavity in MEMS sensor to cause clogging
  • Resistant to vibration and pressure shock
  • Supply Voltage: 5V DC
  • Fast response time
  • Operating temperature range: 0°C to +85°C
  • Analog Output: 0V to 5V
  • Digital Output: I2C

Product Options

Orderable Part ID Part Status Description Pkg. Code Temp. Range Buy Sample
FS2012-1001-LQ Active Liquid, 0 to 0.5 SLPM BD0 0 to 85°C Availability
FS2012-1002-LQ Active Liquid, 0 to 1.0 SLPM BD0 0 to 85°C Availability
FS2012-1020-NG Active Gas, 0 to 2 SLPM BD0 0 to 85°C Availability
FS2012-1100-NG Active Gas, 0 to 10 SLPM BD0 0 to 85°C Availability

Technical Documentation

Title Other Languages Type Format File Size Date
Datasheets & Errata
FS2012 Datasheet Datasheet PDF 392 KB Jul 19, 2017
Application Notes & White Papers
Whitepaper - MEMS Mass Flow Sensor White Paper PDF 347 KB Nov 15, 2017
Other
Sensing Technologies and Sensor Solutions Overview Overview PDF 3.30 MB Apr 10, 2018
FS10xx/FS2012 High-Performance MEMS Flow Sensor Module Family Product Brief PDF 281 KB Feb 9, 2018

Evaluation Boards

Part Number Title Sort ascending
SDAWIR Wireless Flow Rate, Humidity, and Temperature Sensing Evaluation Kit
SDAF0x Mass Flow Sensor Evaluation Kit