Mass flow controllers measure the mass and flow rate of a fluid, as well as control the flow rate. These are used for gas control of semiconductor manufacturing equipment and burners. The RX72M 32-bit microcontroller (MCU) has a large amount of built-in memory and EtherCAT and control area network (CAN) interfaces. With this reference design, the system control and industrial network can be controlled with one chip.

System Benefits

  • The RX72M MCU has an EtherCAT slave controller and CAN, and supports industrial networks 
  • Provides industrial network solutions, including EtherCAT and DeviceNet sample software
     

System Block Diagram

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mass-flow-controller-block-diagram

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