The FS1012 comprise a MEMS flow sensor mounted on a circuit board with a flow housing. It features a 6-pin standard header connected directly to the MEMS flow sensor.

The FS1012 is capable of measuring a non-corrosive gas or liquid medium. The sensor utilizes thermopile sensing, which provides an excellent signal-to-noise ratio and is ideal for applications requiring low power. It is highly sensitive at low flow rates with a very fast response time.

The set of upstream and downstream thermopiles can be used independently in a single-ended circuit or connected together in a differential configuration.


  • Measures gas or liquid mediums
  • Robust solid isolation technology
  • No cavity in MEMS sensor to cause clogging
  • Resistant to vibration and pressure shock
  • Low power application
  • Fast response time
  • Millivolt output
  • Heater supply voltage: 3V to 5V DC
  • Operating temperature range: 0°C to +85°C

Product Options

Orderable Part ID Part Status Description Temp. Range Package Buy Sample
FS1012-1001-LQ Active Liquid, 0 to 0.5 SLPM 0 to 85°C Package Info
FS1012-1002-LQ Active Liquid, 0 to 1.0 SLPM 0 to 85°C Package Info
FS1012-1020-NG Active Gas, 0 to 2 SLPM 0 to 85°C Package Info
FS1012-1100-NG Active Gas, 0 to 10 SLPM 0 to 85°C Package Info

Documentation & Downloads

Title Other Languages Type Format File Size Date
Datasheets & Errata
FS1012 Datasheet Datasheet PDF 385 KB
Application Notes & White Papers
Whitepaper - MEMS Mass Flow Sensor White Paper PDF 478 KB
Sensing Technologies and Sensor Solutions Overview 简体中文 Overview PDF 1.96 MB
FS10xx/FS2012 High-Performance MEMS Flow Sensor Module Family Product Brief PDF 236 KB

Boards & Kits

Part Number Title Type Company
SDAF0x Mass Flow Sensor Evaluation Kit
SDAWIR Wireless Flow Rate, Humidity, and Temperature Sensing Evaluation Kit